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System introduction |
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Processing equipment and Metrology equipment
can be directly controlled by the CIM system through Equipment
automation program. Equipment interface is done through SECS
interface software. Bar code can also be used to integrate with
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System features |
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Equipment mode control;
Equipment initialize control;
Material status tracking;
Equipment operation long-distance control;
Data collection;
Integration process equipment and SMIF equipment;
Alarm management;
Equipment status tracking;
Recipe management;
Communication with MES;
Logging of event to MES system;
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(Click to blow up)
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