![]() |
| |
 |
|
| |
|
|
| |
|
FA-software is teaming up with Applied
Material to deliver the total CIM solution for wafer fabrication
plant and assembly and test facilities using FAB300. FAB300
is the first true next-generation MES package designed specifically
for 300mm wafer facilities. With an imbedded, workflow-driven
integration framework, Applied FAB300 provides superior tool
automation and factory-wide process automation. Unlike all previous
execution systems, FAB300 has been designed to support the extension
and modification of business practices, allowing their rapid,
controlled adjustment in response to changing requirements driven
by both business and technology cycles. Applied FAB300 provides
cluster tool and FOUP (Front Opening Unified Pod) management,
single wafer and non-product wafer management and advanced
fab process execution. Application components include WIP
tracking, equipment and recipe management, data collection,
dispatching. Applied FAB300 comes with a material control
system (MCS) integration adapter for connectivity to MCS systems,
a generic adapter to integrate with other third-party systems
and tool connectivity via the Applied FABConnect product.
|
|
| |
|
|
|
| |
|
|
|
| |
|
|
|
| |
|
|
|
| |
|
|
|
| |
|
|
|